Polishing Solutions

for process optimisation

Encounter experience and strong competence!

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PoliParts

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High Tech Industries

Polishing Processes

We offer solutions for process optimization of any polishing application. Our pad conditioning products are used by essentially all leading semiconductor and substrate manufacturing companies. Our success is based on almost 20 years of experience and strong competence.

PAD CONDITIONING BRUSHES

Product Highlights

The DuraClean series is available in a variety of brush sizes, materials and fiber dimensions for state-of-the-art polishing pad cleaning applications. All our pad conditioning brushes are designed for cleanroom applications, made of semiconductor compatible materials, of highest quality, long lasting and subjected to continuing improvement programs. Please find below a selection from our available Standard Configurations...



DuraClean
DS 108-9-10-SN
OD 108 mm
for soft pads



DuraClean
DS 254-15
OD 254 mm
for soft pads



DuraClean
DS 100-35
OD 100 mm
for hard pads



DuraClean
DS 3010-SN
OD 108 mm
for soft pads

PoliParts was founded in 1999 based on many years of experience in the polishing and semiconductor manufacturing processes. We offer standard and customized consumables as well as spare parts in conjunction with detailed application and process know-how. We give advice and support in the development or optimization of polishing processes as well as concerning design and analysis of experiments. Thus we enable our customers to improve yield and reduce cost of ownership.

  • Excellent cleaning properties due to optimized fiber length, density and hardness.
  • Reduced defect and scratch levels, in particular of randomly occuring macroscratches.
  • Improves pad life due to reduced pad glazing and build-up of polishing debris.
  • Extended brush life by using highly durable brush filaments.
  • Fully semiconductor process compatible.
  • Brush materials exhibit high purity and are chemically resistant against typical CMP cleaning agents.
  • Easy fixturing to pad conditioning end effector of polishing tool by snap mounting, screw fixturing or pressure sensitive adhesive.
  • DuraClean pad conditioning brushes are running successfully in production lines of major semiconductor and silicon manufacturers.
  • Strong competence and many years of experience in the development of special and customized configurations.

Why PoliParts Polishing Solutions?

Innovation


Poliparts enables
significant
Pad life
improvement.

Higher Yield


Brush conditioning
results in
reduction of
defect density.

Better Value


We allow for
significant
yield improvement
and cost reduction.

Achievement


Our success
is a result of
our competence and
our custumer orientation.

Best Practice


We work
on time
and budget.

Independence


We are
100%
independent.

Reliability



We do not
compromise
on quality.

Service


Our mission
is your success.

Get in Touch

Contact Us

Germany

HEADQUARTER

Chiemseestrasse 47
83022 Rosenheim
Germany

T: +49 176 999 48 337
F: +49 8031 31712
E:

Austria

SATELLITE OFFICE

Anzengruberstrasse 9
9500 Villach
Austria

T: +43 676 3896598
E: